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Nanofinder®HE


Nanofinder®HE is a jointly developed product LOTIS TII and Tokyo Instruments Inc.

Main target: 2D/3D Confocal Raman Spectroscopy & AFM/Raman Microscopy for Micro & Nanotechnology Applications such as MEMS, Nanoscale Materials, Molecular Manufacturing, Nanomedicine, Nanoelectronics, Nanotubes , Molecular Biology and others.

Key features:
• All-in-One, fully automatic System
• Internal Base Granite Frame
• High thermal and temporal stability
• Multi-configuration built-in microscope
• Built-in Czerny-Turner Spectrometer (550 mm focal length)
• 2D/3D micro-Raman Spectroscopy
• Combined AFM/Raman Microscopy and Spectroscopy
• Near-Field Raman (TERS & SNOM)
• The highest possible spatial resolution
• The highest possible sensitivity
• Built-in spectral calibration lamp
• High spectral measurement accuracy (auto-calibration)
• Automatic alignment



System configuration:
All-In-One device (opto-mechanical unit, spectrometer,
microscope, multilaser system and controller are integrated in a single case)
Granite frame for exclusive optical system stability
Multi-configuration microscope:
Up-right, Inverted, Transmission - reconfigurable
Bright and Dark-field, Fluorescence observation modes;
Microscope objective lens turret, TV-CCD camera
Scanner: Piezo stage(X-Y-Z)or (X-Y) Stepping Motors or Atomic Force Microscope (AFM)
Excitation Raman laser: (up to 3 built-in plus 1 external port)
Spectrometer: assembled on granite base plate, f=55 cm, 2 exit ports, 3 motorized gratings on exchangeable turret
Detector for VIS Raman: cooled CCD or EMCCD, for NIR Raman or PL: InGaAs, for Fluorescence Lifetime: APD with TCSPC •Computer, LCD (2 monitors in AFM configuration)
Software: advanced Nanofinder®HE software set


3D confocal Raman spectroscopy
Mapping range: 100x100x100 μm with piezo-stage
*Standard. Larger range stages up to 300x300x100 mm are also available.
Mapping speed: < 3 ms/point (full spectrum saving)
*With CCD ADC 3.0 MHz.
Spatial resolution:
Laser wavelength (nm) Objective lens 100x0.95 (air) Objective lens 100x1.25 (water)
XY resolution (nm) Z resolution (nm) XY resolution (nm) Z resolution (nm)
473 200 500 180 400
532 220 550 200 450
*For laser line; XY-edge responce 10-90%, Z-surface responce FWHM

Typical spatial resolution VS laser wavelength in well designed true confocal Raman microscopy system


•Raman shift measurement range:
Laser wavelength (nm) Wave number range (cm-1)
473 120-8000
532 40-8000


Detailed specifications

•Spectral resolution: spectral line FWHM
Grating (G/mm) 1800 75 Echelle
Resolution (cm-1) 0.77 0.2
*Under the following conditions:
1. At the CCD center.
2. Central wavelength 550 nm.
3. CCD pixel size 16x16 mm.

•Spectral accuracy: within 1 pixel of CCD
Grating (G/mm) 1800 75 Echelle
Resolution (cm-1) 0.43 0.1
*Under the following conditions:
1. Central wavelength 550 nm.
2. CCD pixel size 16x16 mm.

Excitation lasers

•Wavelength range :244 nm - 1.06 μm
•Number of built-in lasers : max 3
•Port for external laser : Yes
•Standard laser set (CW for Raman)

Laser wavelength (nm) 473 532 785
Power (mW) 20 50 80
Spatial mode TEM00 TEM00 TEM00
M2 <1.1 <1.1 <1.2
Spectral line width (MHz) <10 <10 <50
Polarization contrast >100:1 >100:1 >100:1


•Picosecond diode lasers for FLIM:
  Wavelength range :375 nm - 640 nm
  Pulse width :40-90 ps
  Repetition rate :20-80 MHz


Spectrometer

•Optical scheme: Czerny-Turner
•Focal length: 550 mm
•Entrance slit: 2 motorized crossed slits, independent control, width 0-2 mm
•Exit ports: 2
•Motorized turret with 3 gratings; turrets and gratings in turrets are user replaceable
•Grating choice: 150, 300, 600, 1200, 1800, 2400, 3600 G/mm, Echelle (75 G/mm)
Grating (G/mm) 600 1800 75 Echelle
Range on CCD (nm)
(cm-1)
75.5
2509
21.4
708
4.8
159
Dispersion (nm/pixel)
(cm-1/pixel)
0.047
1.55
0.0134
0.44
0.0031
0.1

*Under the following conditions:
1. Central wavelength 550 nm.
2. CCD pixel size 16x16 mm.
3. CCD width is 1600 pixels.
4. Automatical spectra calibration with built-in hollow cathode lamp.
5. Granite base plate for thermal and temporal stability

3D Confocal Raman

Highest Sensitivity, Highest Spatial Resolution (XY < 200 nm)
Highest Speed < 3 ms/point (full spectrum saving)

Advantage of the Nanofinder®HE is fast 3D Raman imaging with the highest sensitivity and the highest spatial resolution. It is achieved by employing a high throughput optical system, high sensitivity CCD detector and high accuracy piezo stage .

High Sensitivity

High sensitivity of Nanofinder®HE is confirmed by its ability to clear reveal the 4th-order Si Raman overtone within short exposure time (Fig.1). Intensity of the Si Raman peak at 520 cm-1 (1st-order) is usually strong, but higher overtones show much weaker signal. Therefore, detection ability of higher orders of Si Raman peak may be considered as a sensitivity benchmark of a Raman spectroscopic system. High sensitivity of Nanofinder®HE permits user to minimize the excitation laser power and, therefore, to avoid sample modification or damage.

Si Raman spectrum of the higher order overtones
Measurement conditions:
Excitation laser 8.6 mW@473 nm, measurement time 60 sec
Microscope objective lens MPlanApo N 100X0.95

High Spatial Resolution

Laser Confocal mapping image of Si/SiO2 line&space sample is shown in Fig. 2. Mapping is done in XZ direction (X-axis along the sample surface, Z - orthogonal to the sample surface). Data show lateral resolution (edge responce, when signal rises from 10% to 90%) of 170 nm and axial resolution (FWHM of reflection from sample surface profile) of 380 nm with water-immersion microscope objective lens.

Laser confocal image of Si/SiO2 line&space 1mm/1mm.
Measurement conditions:
Excitation laser 473 nm, Pinhole 18 mm, mapping step 50 nm,
Microscope objective lens: Olympus UPL SAPO 150X1.25.

High Speed

Employing the cutting-edge EMCCD detector, Nanofinder®HE provides sample measurement with the highest sensitivity, the highest accuracy and the highest speed (< 3 ms/point), saving full Raman spectra at every mapping point. TII advanced technology solutions give the fastest scanning procedure in the closed-loop mode.  About 3 seconds are required to implement mapping with 32x32 points (X,Y). Higher resolutions require longer accumulation time:
Resolution vs required mapping time:
- 32x32 (X・Y) :1024 points ~ 3 sec
- 32x32x10 (X・Y・Z):10,240 points ~30 sec
-100x100x30 (X・Y・Z) :300,000 points ~ 900 sec (15 min)

3D Raman image of Si device (at 520 cm-1).
Measurement conditions:
Excitation laser 473 nm, 10 mW, 64x64x16 points, time 3.5 min
Microscope objective lens: 100X0.95

AFM-Raman

Simultaneous Same Sample Area Measurement by AFM and Confocal Raman Combination of confocal Raman system Nanofinder®HE with AFM allows user simultaneous measurements of AFM topography and Raman confocal image of the same sample area. Such correlated topography (AFM) and chemical composition (Raman spectroscopy) data are useful for defect evaluation of semiconductor devices, carbon nanotube analysis, foreign material detection, etc. Different AFM modes (e.g., Phase, Lateral Force, Kelvin Probe, conductive AFM or STM) can be performed simultaneously with confocal Raman mapping. The AFM used with Nanofinder®HE is designed especially for combined operation with this confocal Raman system. With IR laser wavelength of 1300 nm there is no influence between AFM feedback control system and Raman system. The design concept of AFM was focused on full device automation, easy to use, easy to exchange cantilever or sample, easy combining with confocal Raman system (by hardware and software), high stability and small drift for long time measurements.

One AFM head for both reflection and transmission AFM/Raman geometries

While typical AFM/Raman systems have different AFM heads for Reflection and Transmission configurations (combined with Up-right and Inverted microscopes correspondently), the Nanofinder®HE AFM uses only a single head and a single built-in microscope for both Reflection and Transmission confiigurations with possibility of prompt (without sample and tip position change) switching between them.

Access to sample with high NA objective lenses

Especially designed for combined operation with confocal Raman, the AFM of Nanofinder® HE has the best optical access to the sample/probe area: microscope objectives of 100xNA0.7 (from top for opaque samples) and 100xNA1.3 (from bottom for transparent samples) can be applied for simultaneous combined AFM-Raman measurements. As a result, spatial resolution below 50 nm can be achieved in TERS measurement.

AFM-Raman Simultaneous & Same Sample Area Measurement of CNT (Carbon Nano Tube) on cover glass.
Measurement conditions:
Raman: Excitation laser 473 nm, Microscope objective lens: 100X0.9
AFM: Transmission configuration, Non-contact mode

Automated alignment mechanism

AFM measurements is started promptly after automated preparation procedures for locating of laser spot on cantilever and positioning sensor adjustment. With fully automated resonance search, feedback control tuning, approaching and landing, even beginner can get the first AFM mapping result in a few minutes after the system start.

Advanced sample position adjustment 

The AFM is equipped with motorized XY sample positioning system, which ensures the capability of easy returning to (or switching between) points/areas of interest. Fine closed-loop XYZ piezo-scanner, equipped with capacitive sensors, is used for AFM and confocal Raman mapping. The motorized XY stage provides precise sample positioning and the piezo driven XYZ piezo stage ensures fine mapping images.

Focused laser spot/AFM probe position adjustment

Closed loop objective lens scanner is employed for automatical laser spot/AFM tip apex fine alignment. Preliminary alignment can be conducted manually with AFM head positioning with microscrews.

True non-contact mode

True non-contact mode operation is ensured by fast 300 MHz Digital Signal Processor (DSP). Non-contact scanning mode at reduced amplitudes of probe oscillation is optimal for soft samples or delicate AFM probes, avoiding damage of sample or probe due to no sample/probe contact.

Grating monochromator


17, Oktyabrskaya str., Minsk, Belarus, 220030
phone +375 17 321 21 55
fax: +375 17 321 21 56
e-mail info@lotis-tii.com
Tokyo Instruments, Inc., Japan
6-18-14 Nishi-Kasai, Edogawa-ku,
Tokyo 134-0088 Japan
+81 3 3686 4711 phone
sales@tokyoinst.co.jp
Symphotic TII Corporation, USA
880 Calle Plano, Unit K
Camarillo, CA 93012 U.S.A.
+1 805 484 6639 phone
sales@symphotic.com